Toshiba Vacuum Cleaner SR1054HSPCR User Manual

STE 58792–  
INSTRUCTION MANUAL  
INDUSTRIAL ROBOT SR–HSP SERIES  
CLEAN SPECIFICATIONS  
Notice  
1. Make sure that this instruction manual is delivered to the final user of  
the Toshiba Machine's industrial robot.  
2. Be sure to read this manual before installing and operating the  
Toshiba Machine's industrial robot.  
3. Keep the manual nearby for future reference during use of the robot.  
March, 1998  
TOSHIBA MACHINE CO., LTD.  
TOKYO, JAPAN  
 
Preface  
Toshiba Machine's SR–HSP–CR series system robot is designed and manufactured as  
per the clean specifications, taking over the high-speed and high-precision performance  
characteristics of the standard SR–HSP series robot.  
This manual describes the difference in structure, wiring, piping and maintenance of the  
basic robot from the standard specifications. Before actually unpacking, you are  
requested to look through this manual.  
Also, before using this manual, please understand the name and function of each part,  
referring to the Transportation and Installation Manual and Maintenance Manual.  
This manual consists of the following four (4) sections.  
Section 1  
Section 2  
Section 3  
Section 4  
Cautions on Safety  
This section deals with the important information on using the robot safely  
and properly.  
Clean Robot Basic specifications  
This section describes the basic specifications, outer dimensions and  
operating range of the robot.  
Measures against Dust  
This section stipulates the measures against dust when using the robot of  
clean specifications.  
Maintenance and Inspection  
This section describes the difference in maintenance and inspection of the  
basic robot from the standard specifications.  
STE 58792  
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Table of Contents  
Page  
5
Section 1  
Section 2  
Cautions on Safety ............................................................................  
Clean Robot Basic specifications ......................................................  
Basic Robot Specifications...........................................................  
Outer Dimensions ........................................................................  
Operating Range and Coordinate System ...................................  
6
6
7
9
2.1  
2.2  
2.3  
2.4  
Tool Wiring and Piping................................................................. 10  
2.4.1  
2.4.2  
Tool Wiring........................................................................... 10  
Tool Air Piping...................................................................... 10  
Section 3  
Section 4  
Measure against Dust........................................................................ 11  
Specific Measures........................................................................ 11  
Scavenging Piping in the Robot ................................................... 12  
Sealing Robot Cover.................................................................... 13  
3.1  
3.2  
3.3  
Maintenance and Inspection.............................................................. 14  
Maintenance and Inspection Items............................................... 14  
Lubricating Tool Shaft and Tool Shaft Support Bearing ............... 14  
Replacement Parts List for Maintenance of Robot Mechanism.... 15  
4.1  
4.2  
4.3  
STE 58792  
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Section 1  
Cautions on Safety  
This manual contains the important information to prevent the operators and persons  
nearby from injuries, to prevent damage to assets and to ensure correct use.  
Make sure that you well understand the following details (indications and symbols)  
before reading this manual. Always observe the information that is noted.  
[Explanation of indications]  
Indication  
Meaning of indication  
This means that "incorrect handling will lead to fatalities or serious  
injuries."  
Danger  
This means that "incorrect handling may lead to personal injuries  
¿1) or physical damage ¿2)."  
Caution  
¿1) Injuries refer to injuries, burns and electric shocks, etc., which do not require  
hospitalization or long-term medical treatment.  
¿2) Physical damage refers to damages due to destruction of assets or resources.  
[Handling the clean robot]  
Caution  
• Take note that the type of grease used for the ball screw and spline differs from the  
standard specifications. Failure to observe this could cause deterioration of robot  
performance and malfunction.  
• The customer should NEVER change or modify the parts other than those  
stipulated in the instruction manual.  
• For part replacement, be sure to use the spare parts designated by Toshiba  
Machine.  
• Carry out the maintenance and inspection regularly.  
Unless they are executed, an abnormality or malfunction cannot be found, resulting  
in accidents.  
STE 58792  
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Section 2  
Clean Robot Basic Specifications  
2.1  
Basic Robot Specifications  
Table 2.1 shows the basic specifications of the clean robot.  
Table 2.1 Basic robot specifications  
Model  
Full length  
SR–654HSP–CR  
650 mm  
350 mm  
300 mm  
±115°  
SR–1054HSP–CR  
1,050 mm  
580 mm  
470 mm  
±115°  
Arm length  
Arm 1  
Arm 2  
Operating range  
Axis 1  
Axis 2  
±140°  
±145°  
Axis 3 (vertical)  
Axis 4 (wrist rotation)  
Axis 1  
185 mm  
±280°  
255°/s  
185 mm  
±360°  
170°/s  
Maximum speed  
Axis 2  
360°/s  
270°/s  
Axis 3 (vertical)  
Axis 4 (wrist rotation)  
Composite  
800 mm/s  
864°/s  
800 mm/s  
576°/s  
4.77 m/s  
5.33 m/s  
Load  
Mass of workpiece to  
be carried  
5 kgf (rated)  
(Max. 10 kgf)  
10 kgf (rated)  
(Max. 20 kgf)  
2
2
Permissible inertia  
moment at the tip  
0.0663 kgf·m  
0.1 kgf·m  
Repeatability  
X, Y (plane)  
±0.02 mm  
±0.01 mm  
±0.03°  
±0.03 mm  
±0.02 mm  
±0.03°  
Axis 3 (vertical)  
Axis 4 (wrist rotation)  
Tool wiring and air piping  
Degree of cleanliness  
Drive system  
12 cables and 2 pipelines  
Designed for cleanliness 10 (¿ Note 1)  
AC servo motor  
Mass of the basic body  
Robot controller  
65 kgf  
95 kgf  
SR7000  
Note 1: Cleanliness 10:  
When this robot is operated in the clean bench (cleanliness 1 or less)  
installed in the downflow clean room, the number of fine particles of 0.3  
3
µm or over contained in 1 ft as measured in the plane of the lower end  
position of axis 3 stroke is ten (10) or less.  
Air speed of downflow is 0.3 ~ 0.5 m/s.  
STE 58792  
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2.2  
Outer Dimensions  
Figures 2.1 and 2.2 show the external view of the basic robot.  
Figure 2.1 SR–654HSP–CR external view  
STE 58792  
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Figure 2.2 SR–1054HSP–CR external view  
STE 58792  
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2.3  
Operating Range and Coordinate System  
For the clean specifications, the operating range of axis 3 (vertical) is smaller than  
the standard specifications.  
When installing the robot, review the layout after confirming the operating range  
shown in Figures 2.3 and 2.4.  
The zero point of the base coordinate system and each joint angle is the same as in  
the standard specifications.  
Figure 2.3 SR–654HSP–CR operating range  
Figure 2.4 SR–1054HSP–CR operating range  
STE 58792  
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2.4  
Tool Wiring and Piping  
This paragraph describes the wiring and air piping for the tool.  
2.4.1  
Tool Wiring  
For the tool wiring, see the descriptions on tool wiring (Para. 4.2.2) included in the  
Transportation and Installation Manual.  
For the wiring, be sure to use the connector at the lower side of arm 2.  
2.4.2  
Tool Air Piping  
In all, two (2) air pipelines (outer dia. 6 mm × inner dia. 4 mm) are available for the  
tool. Figures 2.5 and 2.6 show the joint locations of these pipelines.  
Lower side of arm 2  
Rear side of fixed base  
Figure 2.5 Location of SR–654HSP–CR piping joint  
Lower side of arm 2  
Rear side of fixed base  
Figure 2.6 Location of SR–1054HSP–CR piping joint  
STE 58792  
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Section 3  
Specific Measures  
1) Ball screw and spline  
The ball screw and spline shafts are hard chrome plated.  
Balls of the ball screw nut and spline nut are made of stainless steel.  
They are lubricated with clean fluorine base grease.  
2) Axis 4 rotating unit  
The axis 4 rotating unit has a labyrinth structure.  
3) Robot internal scavenging  
The arm 2 cover interior and axis 4 rotating unit are scavenged by means of an  
air tube.  
4) Totally enclosed structure  
The arm 2 cover is equipped in such a manner that there is no clearance with  
the arm. Additionally, they are completely sealed with sealant to prevent dust  
flow into the outside and to increase negative pressure.  
5) Painting  
Melamin baking finish is used for all paining.  
6) Bolt and air fitting  
All bolts exposed are made of SUS304.  
All air fittings exposed are non-electrolytic nickle plated.  
7) User's wiring and piping  
The user's wiring and piping run under the arm 2.  
The user's wiring can be easily removed and attached by means of a round  
connector.  
8) Assembly and test  
Assembly and test are conducted in the clean booth of class 10000.  
9) Packing  
After cleaning the robot exterior with alcohol, the entire robot is packed in a  
polyethylene bag for delivery.  
As no clean measures are taken on controller SR7000, take utmost care of the place  
where it is to be installed.  
STE 58792  
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3.2  
Scavenging Piping in the Robot  
An air tube is incorporated in the clean robot for scavenging.  
Figures 3.1 and 3.2 show the piping of the air tube.  
When operating the robot as the clean robot, scavenge through the air fitting, using  
a scavenging vacuum pump (or equivalent to be provided by the user). Yardstick  
for the scavenging volume is 75 liters/min.  
If the robot is operated without scavenging, the specified degree of cleanliness  
cannot be maintained.  
Figure 3.1 SR–654HSP–CR scavenging air piping  
STE 58792  
– 12 –  
 
Figure 3.2 SR–1054HSP–CR scavenging air piping  
Sealing Robot Cover  
3.3  
To maintain a better effect, the clean robot cover is filled up with sealant to eliminate  
any clearance and to realize a totally closed robot structure. Dust in the robot will  
not flow into the outside.  
Except for the internal inspection and adjustment, DO NOT remove the cover.  
STE 58792  
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Section 4  
Maintenance and Inspection  
4.1  
Maintenance and Inspection Items  
The maintenance and inspection schedule and inspection items are the same as in  
the standard specifications. For details, see Section 1 of the Maintenance Manual.  
Bear in mind that the type of grease for the ball screw and spline differs from the  
standard specifications.  
4.2  
Lubricating Tool Shaft and Tool Shaft Support Bearing  
For the tool shaft, use the following grease.  
• FONBLINE Grease OT–20 (maker: AUSIMONT)  
For the greasing, see Para. 2.3.4 of the Maintenance Manual (STE 58766).  
Caution  
• Be sure to select the proper grease. If the wrong grease is selected, the robot  
performance will deteriorate, resulting in malfunction.  
STE 58792  
– 14 –  
 
4.4  
Replacement Parts List for Maintenance of Robot Mechanism  
Table 4.1 SR–654HSP–CR replacement parts list for maintenance  
Part name  
Dwg. No./Type  
Maker  
Toshiba  
Q'ty  
1
Remarks  
For axis 1  
For axis 2  
For axis 3  
For axis 4  
For axis 1  
For axis 2  
For axis 4  
AC servo motor T–Z06030S–OU001  
T–Y04030S–OU001  
Machine  
1
T–Z02030S–BOU002  
1
T–Y01030S–BOU001  
1
Harmonic drive P0712544P1  
P0713566P1  
Harmonic  
1
Drive Systems  
1
Planetary  
reduction gear  
K0713184P1  
Toshiba  
Machine  
1
Timing belt  
UNITTA  
1
1
1
1
1
1
For axis 3  
For axis 4  
For axis 3  
For axis 3  
For axis 4  
For axis 4  
Clean spec.  
73113×9  
75113×20  
Timing pulley  
K0713127P1  
K0713126P1  
K0713128P1  
K0713125P1  
P0712543P3  
Toshiba  
Machine  
Ball screw,  
spline  
Sensor  
AN9145  
Matsushita  
Controls  
7
For axes 1, 2  
& 4  
GXL–8FB  
RS–1SH  
3
1
For axis 3  
For axis 4  
Japan  
Automation  
Harness  
Grease  
T0711393G1  
SK–1A  
Toshiba  
Machine  
1
Harmonic  
Drive Systems  
500 g,  
2.5 kg  
OT–20  
AUSIMONT  
100 g  
Caution  
• All items other than the sensor and grease listed above are options. When  
purchasing them, place an order with us.  
• NEVER replace the parts by the customer.  
STE 58792  
– 15 –  
 
Table 4.2 SR–1054HSP–CR replacement parts list for maintenance  
Part name  
Dwg. No./Type  
Maker  
Toshiba  
Q'ty  
1
Remarks  
For axis 1  
For axis 2  
For axis 3  
For axis 4  
For axis 1  
For axis 2  
For axis 4  
For axis 3  
For axis 4  
For axis 3  
For axis 3  
For axis 4  
For axis 4  
Clean spec.  
AC servo motor T–Z06030S–OU001  
T–Y04030S–OU001  
Machine  
1
T–Y02030S–BOU001  
T–Z02030S–BOU002  
Harmonic drive P0712555P1  
P0712544P1  
1
1
Harmonic  
1
Drive Systems  
1
M0713610P1  
1
Timing belt  
UNITTA  
1
73167×9  
1
75172×25  
Timing pulley  
K0713159P1  
K0713126P1  
K0713158P1  
K0713160P1  
P0712543P3  
Toshiba  
Machine  
1
1
1
1
Ball screw,  
spline  
Bearing  
6200ZZ  
3
1
For axis 4  
6810DDU  
Contact  
rubber seal  
Sensor  
AN9145  
Matsushita  
Controls  
7
For axes 1, 2  
& 4  
GXL–8FB  
RS–1SH  
3
1
For axis 3  
For axis 4  
Japan  
Automation  
Harness  
Grease  
T0711405G1  
SK–1A  
Toshiba  
Machine  
1
Harmonic  
Drive Systems  
500 g,  
2.5 kg  
OT–20  
AUSIMONT  
100 g  
Caution  
• All items other than the sensor and grease listed above are options. When  
purchasing them, place an order with us.  
• NEVER replace the parts by the customer.  
STE 58792  
– 16 –  
 
Edition  
No.  
Revised  
Date  
Revision  
In Charge  
Newly prepared.  
March,  
1998  
1
2
3
4
APPROVED BY:  
CHECKED BY:  
PREPARED BY:  
STE 58792  
– 17 –  
 
BARAUCHI  
Page 3 (in Japanese version)  
(1)  
(2)  
(3)  
(4)  
(5)  
(6)  
(7)  
4–ø18 hole, counterbore 26  
Controller cable  
Cable length  
2–ø22 hole  
User's air fitting  
Scavenging air fitting  
Max. 1000  
Page 4  
(1)  
(2)  
(3)  
(4)  
(5)  
(6)  
(7)  
4–ø18 hole, counterbore 26  
Controller cable  
Cable length  
2–ø22 hole  
User's air fitting  
Scavenging air fitting  
Max. 950  
Page 6  
(1)  
Hand wiring connector  
(2)  
Pipeline B  
(3)  
Pipeline A  
(4)  
Pipeline A  
(5)  
Pipeline B  
(6)  
Scavenging air fitting  
Hand wiring connector  
Pipeline B  
(7)  
(8)  
(9)  
Pipeline A  
(10)  
(11)  
(12)  
Pipeline A  
Pipeline B  
Scavenging air fitting  
Page 8  
(1)  
(2)  
(3)  
Scavenging in arm 2  
Union Y-bend  
Scavenging of axis 4 rotating unit  
STE 58792  
– 18 –  
 
(4)  
(5)  
(6)  
(7)  
Air tube (O.D. 6 mm × I.D. 4 mm)  
Elbow  
Tool air fitting  
Scavenging air fitting  
Page 9  
(1)  
(2)  
(3)  
(4)  
(5)  
(6)  
(7)  
Scavenging in arm 2  
Union Y-bend  
Scavenging of axis 4 rotating unit  
Air tube (O.D. 6 mm × I.D. 4 mm)  
Elbow  
Tool air fitting  
Scavenging air fitting  
STE 58792  
– 19 –  
 

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